Integration of full-spectrum metrology and polishing for rapid production of large aspheres, Phase I

Metadata Updated: November 12, 2020

Integration of three proven, non-contact, optical metrology techniques with an emerging new polishing approach in a single machine will enable the rapid production of large aspheric mirrors with nanometer-class overall accuracy, excellent smoothness, and nearly arbitrary radius of curvature (concave or convex) and aspheric form.

Two of the metrology approaches are a multi-point profilometer that we have previously demonstrated to have nanometer-level accuracy for low spatial frequencies; and a curvature-measuring profilometer that we have previously demonstrated to have 0.1-nanometer-level accuracy for mid-spatial frequencies. In addition, we propose the simple addition of a scatterometry-based measurement head for high spatial frequencies. The baseline polishing approach is fluid jet polishing, which has been shown to be capable of both fine grinding and polishing. A new understanding of the synergism of these metrology techniques with ductile polishing promises to take in situ metrology and optical fabrication to a major new level.

NASA is continually pushing the frontier in astronomical and earth-observing optical systems. Many of these systems, whether they operate in the x-ray (at normal incidence), ultraviolet, visible, or infrared, have the meter-class (and beyond) optics that would greatly benefit from this technology.

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Public: This dataset is intended for public access and use. License: No license information was provided. If this work was prepared by an officer or employee of the United States government as part of that person's official duties it is considered a U.S. Government Work.

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Metadata Created Date November 12, 2020
Metadata Updated Date November 12, 2020

Metadata Source

Harvested from NASA Data.json

Additional Metadata

Resource Type Dataset
Metadata Created Date November 12, 2020
Metadata Updated Date November 12, 2020
Publisher Space Technology Mission Directorate
Unique Identifier Unknown
Identifier TECHPORT_4994
Data First Published 2004-07-01
Data Last Modified 2020-01-29
Public Access Level public
Bureau Code 026:00
Metadata Context
Metadata Catalog ID
Schema Version
Catalog Describedby
Homepage URL
Program Code 026:027
Source Datajson Identifier True
Source Hash 069878f344f0281694e43e4429e608c6f7372aed
Source Schema Version 1.1

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